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DWL 66+激光直写系统
 
   
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DWL 66+激光直写系统

研究开发用的激光无掩模直写制程系统:DWL 66+ 以低价格实现高分辨率,能于立体构造上进行 3维的绘画方式 。DWL 66+ 适用于掩模板的试制和直接进行描写的研究开发。低价格且高分辨率的激光图形直写系统。最大基板尺寸为 9" × 9",最小绘画尺寸 0.6μm 。能作出复杂的立体构造进行 3维的绘画。 DWL 66+ 的基本顾客,包括全球超过 150 家以上的顶尖大学和研究机构。

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DWL 66+ 适用于掩模板的试制和直接进行描写的研究开发。低价格且高分辨率的激光图形直写系统。最大基板尺寸为 9" × 9",最小绘画尺寸 0.6 μm 。能作出复杂的立体构造进行 3维的绘画。

DWL 66+ 的基本顾客,包括全球超过 150 家以上的顶尖大学和研究机构。DWL 66+ 的系统机能,包括密切协助这些机构团体以进行各项的开发。

主要功能:

  • 最大基板尺寸: 9" × 9"
  • 最小描绘尺寸: 0.6 μm
  • 最小描绘网格: 10 nm
  • 6 种描绘模式
  • 3D 描绘模式
  • alignment 用照相机系统
  • 背部侧面 · alignment · 系统
  • 选择可能的激光来源
  • 光学/空气量规  
  • 多种多样的绘画数据输入格式 :(DXF,CIF,GDSII,Gerber,STL)

应用范围:

  • MEMS
  • Bio-MEMS
  • Micro Optics
  • ASICs, Micro Fluidics
  • Sensors, CGHs
  • Micro sensor

Tabletop Micro Pattern Generator

The μPG 101 is an extremely economical and easy to use micro pattern generator for direct writing applications and low volume mask making. The system can be used for applications such as MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution microstructures.

The μPG 101 offers a very small footprint of only 60 x 75 cm² featuring a compact design with all electronic components integrated into the system. A personal computer is used for system control. The Windows®based control software makes it easy for users to convert the designs, perform a manual or automatic alignment and start the exposure.

The µPG 101 is designed to provide an easy and fast way to create the microstructures needed for your business or research. The tabletop system features exchangeable write modes to meet the resolution and write speed requirements of your specific application. It is the only available desktop lithography system in the market, which can produce sub-micron features. The small address grid allows placement of structures with very high accuracy. The real-time autofocus system monitors and corrects focus position during exposure, which guarantees high resolution and repeatability over the entire exposure area. Small address grid and real-time autofocus system are essential features for a professional micr